Hubei Three Gorges Laboratory

Carry out research on four key tasks: multi-level purification technology for ultra-high purity electronic chemicals, functional formulated chemicals, compound semiconductor materials, photoresists and supporting materials, break through the "stuck neck" technology of key microelectronic chemicals, and help world-class electronics Construction of chemicals special area.

Microelectronics key chemicals

main research contents

1. Development of analytical and testing methods for trace impurities in ultra-high purity electronic chemicals

2. New technology for multi-stage purification of electronic gas

3. Study on the corrosion inhibition mechanism of active substances in cleaning solution on organic impurities and metals

4. Study on the Nucleation and Growth Mechanism of Nanoabrasive in Polishing Solution

5. Preparation technology of high-purity gallium phosphide single crystal

6. Efficient purification process of metal ions and particulate matter in diazo-naphthoquinone type sensitizers

7. Testing technology for ultra-trace metal ions and particulate matter content in photosensitizers

8. New G/I line photoresist product compounding process