Carry out research on key microelectronic chemicals such as ultra-high purity humidity electronic chemicals and electronic gases, break through the "stuck neck" technical bottleneck, and help Hubei build a domestic first-class electronic chemical production base.
Microelectronics key chemicals
Research on chip etching mechanism, screening of additives, development of new products such as CMP process polishing solutions, post-cleaning solutions, photoresist developer solutions, and stripping solutions.
main research contents
1. Ultra-high purity humidity electronic chemicals
2. High-performance formulated chemicals
3. Electronic special gas purification technology
General technology for purifying electronic chemical raw materials, multi-stage purification technology, etc.
Develop 6N-level gas purification technology (deep gas purification, water removal, oxygen removal, etc.), research and apply special electronic gas cylinders and safe and efficient gas filling technology.